Pressure mode control of pneumatic isolation table with two degrees-of-freedom

摘要

This paper considers the vibration control of a pneumatic isolation table with two degrees-of-freedom. This table is supported two air springs. We propose mode control for the pressure management of air springs instead of independent control. Effects of pressure mode control are shown by time and frequency responses. In addition, decoupling of this system is analyzed by calculating transfer function. Furthermore when air springs are not ideal, parameters of pneumatic isolation table have unevenness. It is examined if modified Hadamard matrix compensates for this.