Study on the nature frequency of optical excitation quartz tuning fork sensor

摘要

The finite element method is used to analyze the nature frequency changing with the structure sizes of MEMS quartz tuning fork. Through the analysis, it can be found that the length and the width of tuning fork arms influence the nature frequency in a large extent. However, the nature frequency has a little influence by changing the gap between the tuning fork arms. So, when using the second order nature frequency, these influencing factors should be taken into consideration. By analyzing the relationship between the nature frequency and structure sizes, the range of tuning fork structure sizes can be acquired, it can ensure the second order nature frequency without disturb by first or third order nature frequency.