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Stress and adhesion determination of a wedged iron film system by buckle morphologies

机译:用屈曲形态确定楔形铁膜系统的应力和附着力

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By using the mobile property of silicone oil, a wedged iron (Fe) film system, deposited on glass substrate, has been prepared by dc-magnetron sputtering technique. The wedged Fe film is quenched by the silicone oil during deposition, and therefore contains a very high compressive stress, which is relieved by formation of a large number of telephone cord buckles. Both the buckle width l and maximum buckle deflection δ increase linearly with the film thickness, but the ratio of δ to l ( δ/l ) decreases steadily. The internal stress and adhesion energy are estimated in the frame of continuum elastic theory.
机译:利用硅油的流动性,通过直流磁控溅射技术制备了沉积在玻璃基板上的楔铁膜。楔入的Fe膜在沉积过程中会被硅油淬火,因此含有很高的压应力,可通过形成大量电话线带扣来缓解这种压应力。带扣宽度l和最大带扣挠度δ都随着膜厚度线性增加,但是δ与l的比(δ/ l)稳定地减小。在连续弹性理论的框架内估计内部应力和粘附能。

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