Synthesis of MoS2 via in situ sulfurize sputtering Mo

摘要

Transition metal dichalcogenides (TMDS) have attract more attention, but it is still a tricky issue to synthesize large area MoS2 nanofilms. Here a two-step process method was used to produce MoS2 nanofilms with large scale. Pre-studies have proved that the crystallinity of sputtered Mo precusors have great effect on MoS2 synthesis. By using varing deposition powers the diffierent crystallinities of Mo films can be obtained. Then magnetron sputtered Mo thin-films were used as Mo precusor to synthesize MoS2 nanofilm in high tempreture. By controlling the sputtering power of Mo, a certain crystal orientation of Mo thin film can be deposited which can enhance the Raman spectrum and improve the quality of MoS2 nanofilms.