Maximizing the Potential of Rotatable Magnetron Sputter Sources for Web Coating Applications

摘要

A new type of linked magnetic field between two neighbouring rotatable magnetrons has been investigated tocompare with the traditional form of magnetic design. The linking has the potential to vary the plasmaconditions at the substrate and better control the movement of electrons in the plasma and hence reduceheating of the substrate. Comparisons have been made for AZO type layers created by both magnetic designs,and also in reactive and non-reactive environments. It has been shown that the linked magnetic design createslower resistivity AZO layers than the traditional approach. Also, the reactive process gives improved filmswhen compared to the ceramic based process on room temperature substrates.