A Lorentz Force Magnetometer with 600 nT/√Hz Resolution over a Bandwidth of 480 Hz utilizing Force Feedback and CMOS Readout Electronics

摘要

This work presents a 1D-Lorentz force magnetometer embedded in an integrated electromechanical closed-loop readout circuit. The readout circuit tracks the mechanical resonance frequency of the sensor in order to operate it with the highest sensitivity and to maximize the system resolution. Electrostatic force feedback is deployed to attain a high signal bandwidth. The system achieves a resolution of 600 nT/√(Hz), over a bandwidth of 480 Hz. Except for the current driver all circuit components are integrated on-chip and have a power consumption of 532 μW.