silicon; elemental semiconductors; aluminium compounds; titanium compounds; ohmic contacts; piezoresistive devices; pressure sensors; thermal stability; diffusion barriers; pressure gauges; contact resistance; piezoresistance; ageing; circuit reliability; ohmic contacts; piezoresistive pressure sensors; thermal drift; long term stability; diffusion barrier; metal lines; polysilicon gauges; contact resistance; resistivity variations; aging time effects; sensor reliability; 150 degC; AlTi-TiW; Si;
机译:AlTi / TiW在高温传感器的多晶硅触点上的可靠性研究
机译:恶劣环境压力传感器的金属线,多晶硅规和欧姆接触的长期稳定性
机译:恶劣环境压力传感器的金属线,多晶硅规和欧姆接触的长期稳定性
机译:ALTI / TIW,多晶硅和欧姆触点对压阻式压力传感器应用的可靠性研究
机译:通过铝诱导结晶获得的纳米晶压阻多晶硅膜,用于压力传感应用。
机译:低压条件下高灵敏度压阻式压力传感器的设计与应用
机译:压阻式压力传感器:对超高敏感压阻式压力传感器的协同抗性调制(ADV。Mater。Technol.4/2020)