首页> 外文会议>ASME international mechanical engineering congress and exposition;IMECE2011 >A MODEL TO PREDICT CONTACT RESISTANCE DURING CONTACT SOLIDIFICATION IN RIBBON GROWTH ON SUBSTRATE PROCESS
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A MODEL TO PREDICT CONTACT RESISTANCE DURING CONTACT SOLIDIFICATION IN RIBBON GROWTH ON SUBSTRATE PROCESS

机译:在基体过程中预测碳带中凝固过程中接触电阻的模型

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Ribbon Growth on Substrate (RGS) has emerged as a promising method for growing multicrystalline silicon wafer directly on a substrate for photovoltaic applications. In this method, the wafer forms as a substrate contacts molten silicon for a controlled period of time. Due to the surface roughness, a thin layer of air is trapped at the interface of the substrate and molten silicon, leading to a contact resistance to heat transfer. The interfacial heat transfer plays an important role in determining the subcooling rate and nucleation, which defines the structural characteristics of the wafer. The contact resistance has been identified as an important phenomenon that affects solidification at the interface. It is dependent on many factors such as the roughness and wetting of the substrate as well as the substrate pre-heating temperature. Quantitative knowledge of the interfacial heat transfer resistance is essential for control of the solidification process. A mathematical model is presented for quantification of the interfacial heat transfer resistance during the initial stage of the solidification for RGS process. A three dimensional unit cell is constructed to represent the contact geometry and interface characteristics. The surface roughness, the mean trapped air layer between the substrate and the liquid, the parameters of area density and the radius of contact spots will be included in the geometry of the unit cell. A microscale heat transfer model is developed to describe conduction and radiation across the interface to quantify the contact heat transfer resistance as a function of surface roughness, morphology and preheating temperatures of the substrate. The contact resistance is incorporated into a heat transfer model and predicts the temperature variation with time in the substrate during the initial stage of contact. The presented model provides a valuable tool to predict the effect of various process parameters and substrate surface roughness on wafer growth during the RGS process.
机译:基底上的带状生长(RGS)已经成为一种有前途的方法,可以直接在用于光伏应用的基底上生长多晶硅晶片。在这种方法中,晶片在受控的时间段内随着基板与熔融硅的接触而形成。由于表面粗糙度,一薄层空气被困在基板和熔融硅的界面处,从而导致接触传热的阻力。界面传热在确定过冷速率和成核作用方面起着重要作用,这决定了晶片的结构特性。接触电阻已被认为是影响界面固化的重要现象。它取决于许多因素,例如基材的粗糙度和润湿性以及基材的预热温度。界面传热阻力的定量知识对于控制固化过程至关重要。提出了一个数学模型,用于量化RGS过程凝固初期的界面传热阻力。构造了一个三维单位单元,以表示触点的几何形状和界面特性。表面粗糙度,基材和液体之间的平均捕获空气层,面积密度和接触点半径的参数将包括在单位晶格的几何形状中。开发了一个微型热传递模型来描述跨界面的传导和辐射,以量化接触热传递电阻,该函数是基底的表面粗糙度,形态和预热温度的函数。接触电阻被合并到热传递模型中,并预测接触初始阶段中基板中温度随时间的变化。所提出的模型提供了一种有价值的工具,可以预测RGS工艺期间各种工艺参数和基板表面粗糙度对晶片生长的影响。

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