Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics

机译：利用相位检索方法从Hartmann波前传感器重建亚孔径相位，用于EUV自适应光学

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A Hartmann Wavefront Sensor (HWS) is used as a tool to measure phase aberration at the EUV wavelength.Nevertheless, a conventional HWS measures only the wavefront slope in each sub-aperture and is not able tomeasure the phase structure inside it. This lea

机译：使用Hartmann波前传感器（HWS）来测量EUV波长处的相差，但是传统的HWS仅测量每个子孔径中的波前斜率，而无法测量其内部的相结构。这个lea

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《Conference on extreme ultraviolet (EUV) lithography III》|2012年|P.19.1-19.9|共9页
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A. Polo; N. van Marrewijk; S. F. Pereira; H. P. Urbach;
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中图分类微电子学、集成电路（IC）;微电子学、集成电路（IC）;
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1. Optimal noise-weighted reconstruction with elongated Shack-Hartmann wavefront sensor images for laser tomography adaptive optics [J] . Richard M. Clare, Miska Le Louarn, Clementine Bechet Applied optics . 2010,第31期

机译：使用拉长的Shack-Hartmann波前传感器图像的最佳噪声加权重建，用于激光层析成像自适应光学
2. Real-time adaptive optics with pyramid wavefront sensors: part II. Accurate wavefront reconstruction using iterative methods [J] . Hutterer Victoria, Rarnlau Ronny, Shatoknina Iuliia Inverse Problems: An International Journal of Inverse Problems, Inverse Methods and Computerised Inversion of Data . 2019,第4期

机译：采用金字塔波前传感器的实时自适应光学器件：第二部分。使用迭代方法精确的波前重建
3. Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method [J] . Li Jing, Gong Yan, Chen Hongfu, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2015,第Null期

机译：使用Hartmann-Shack传感器的相位检索方法进行波前重构
4. A Kind of Shack-Hartmann Wavefront Sensor with Extremely Large Number of Subapertures for Adaptive Optics System of ExtremelyLarge Telescope [C] . Ang Zhang, Changhui Rao, Xuejun Zhang, Conference on Adaptive Optics Systems . 2008

机译：一种用于超大望远镜自适应光学系统的具有大子孔径的Shack-Hartmann波前传感器
5. Adaptive optics in nonlinear microscopy implemented with open-loop control and EMCCD-based Shack-Hartmann wavefront sensor. [D] . Sun, Wei. 2014

机译：非线性显微镜中的自适应光学器件，通过开环控制和基于EMCCD的Shack-Hartmann波前传感器实现。
6. Shack-Hartmann wavefront-sensor-based adaptive optics system for multiphoton microscopy [O] . Jae Won Cha, Jerome Ballesta, Peter T.C. So 2010

机译：基于Shack-Hartmann波前传感器的多光子显微镜自适应光学系统
7. Comparative theoretical and experimental study of a Shack-Hartmann and a Phase Diversity SENSOR, for high-precision wavefront sensing dedicated to Space Active Optics [O] . Montmerle Bonnefois A., Fusco T., Meimon S., 2014

机译：Shack-Hartmann和相位分集SENSOR的比较理论和实验研究，用于空间有源光学专用高精度波前传感
8. Wavefront Reconstruction Methods for a Natural Guide Star Adaptive Optics Application to the Keck Telescope [R] . Milman, M., Needels, L., Redding, D. 1994

机译：自然导星自适应光学在Keck望远镜中应用的波前重建方法

Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics

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