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ELECTRON BEAM DEPOSITED MULTILAYER OPTICAL INTERFERENCE COATINGS USING OXIDE COMPOSITES

机译:使用氧化物复合材料的电子束沉积多层光学干涉涂层

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Optical multilayer interference coatings are not only the key elements/components of the lasers, synchrotron (beam lines), and solar devices but also serve to propagate, deliver and manipulate electromagnetic radiations involved there for materials science experiments. Composite oxide thin film materials have added several promising dimensions with respect to the design, development of such precision devices related to such applications. Binary ZrO_2 MgO and ternary ZrO_2-MgO-Al_2O_3 oxide composite thin films have been deposited using electron beam physical vapor deposition (EB-PVD) technique and nano-metric multilayer devices utilizing such films in a regular periodic layered design have been developed. As a specific objective, a multilayer high-reflection (HR) laser mirror having a designated bandwidth has been designed and developed for the Nd:YAG second harmonic laser wavelength of 532 nm. These composite thin films and multilayers have been characterized using various microstructural probing techniques.
机译:光学多层干涉涂层不仅是激光器,同步加速器(光束线)和太阳能设备的关键元件/组件,而且还用于材料科学实验中传播,传递和操纵其中涉及的电磁辐射。复合氧化物薄膜材料在与这种应用有关的这种精密装置的设计,开发方面增加了一些有希望的尺寸。已经使用电子束物理气相沉积(EB-PVD)技术沉积了二元ZrO_2 MgO和三元ZrO_2-MgO-Al_2O_3氧化物复合薄膜,并且已经开发出以规则的周期性分层设计使用这种膜的纳米多层器件。作为一个特定目的,已经设计并开发了具有指定带宽的多层高反射(HR)激光镜,用于532 nm的Nd:YAG二次谐波激光波长。这些复合薄膜和多层膜已经使用各种微结构探测技术进行了表征。

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