High Resolution Optical Profilometry Using Diffractive Tomographic Microscopy

摘要

In this paper, we numerically demonstrate that an iterative inverse method based on a rigourous wave scattering model can be used to retrieve the profile of a rough metallic interface from the complex scattering amplitude in far-field. Tansversal resolution is subwave-length, and below the classical resolution limit when the profile is sufficiently rough for multiple interactions to occur. Large profiles, with tens of wavelength, can thus be investigated.