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Interferometry for picometer-level dimensional stability measurements

机译:用于皮克级尺寸稳定性测量的干涉仪

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The accuracy of high-end industrial equipment and the reliability of produced goods can be limited by dimensional drift phenomena. Examples are the life cycle stability of instrumentation for space missions and the tight requirements for measurement uncertainty in the integrated circuit semiconductor industry. Re-calibration intervals of metrology instrumentation are a relevant cost factor in production. Detailed knowledge of drift stability on various timescales from minutes to weeks is needed for materials and constructional elements, such as glued or bolted joints. We report on the development of an optical heterodyne interferometer concept for the investigation of dimensional stability. The contactless, double-sided optical scheme directly probes dimensional length changes of prismatic samples, whilst the balanced configuration provides common mode rejection of perturbations that act similarly on the measurement and the reference beam. For a detailed description of the optical scheme, see Ref. [1]. In a twin configuration, a second interferometer with similar beam paths is located in close proximity to the sample measurement interferometer. With a vacuum tube included, this second interferometer is considered to act as a refractometer for efficient in-situ correction of air refractive index fluctuations. Alternatively, angular degrees of freedom, such as sample flexure, may be accessed through the twin-configuration. Given a sampling rate larger than approximately 10 Hz, i.e. larger than the thermal expansion rate of typical sample materials (e.g. Zerodur, SiC), sudden intrinsic sample instability events should be observable and discriminated from the slower thermal drift behaviour of both sample and interferometer.
机译:高端工业设备的精度和制成品的可靠性可能会受到尺寸漂移现象的限制。例如,太空任务仪器的生命周期稳定性以及集成电路半导体行业对测量不确定度的严格要求。计量仪器的重新校准间隔是生产中的相关成本因素。对于材料和结构元素(例如,胶合或螺栓连接),需要在几分钟到几周的不同时间范围内获得详细的漂移稳定性知识。我们报告了光学外差干涉仪概念的发展,以研究尺寸稳定性。非接触式双面光学方案可直接探测棱柱形样品的尺寸长度变化,而平衡配置则可提供对干扰的共模抑制,该扰动对测量光束和参考光束的作用类似。有关光学方案的详细说明,请参见参考资料。 [1]。在双胞胎配置中,具有相似光束路径的第二干涉仪紧邻样品测量干涉仪。包括一个真空管,该第二个干涉仪被认为是折射仪,用于有效地原位校正空气折射率的波动。可替代地,可以通过双配置访问角自由度,例如样品挠曲度。如果采样率大于大约10 Hz,即大于典型样品材料(例如Zerodur,SiC)的热膨胀率,则应观察到突然的固有样品不稳定性事件,并应将其与样品和干涉仪的较慢热漂移行为区分开来。

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