An X-band phased-array RF integrated circuit with built-in self-test (BIST) capabilities is presented. The BIST is accomplished using a miniature capacitive coupler at the input of each channel and an on-chip I/Q vector receiver. Measurements done with BIST system agree well with S-parameter data and provide the amplitude and phase response over phase states and over frequency. To our knowledge, this is the first implementation of an on-chip BIST and with high accuracy.
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