Arrays of microplasma jets have been fabricated in microcavities having cylindrical or double parabolic cross-section. The typical diameter of these microcavities is 250–300 µm and the depth of the entire device is ∼250 µm. Fabricated by micromachining of nanoporous alumina grown on Al foil1, the plasma jet devices were operated with a feedstock gas having a flow rate of 1∼7 standard L/min. Arrays as large as 5 × 5 jets have been demonstrated for which the jet length and array pitch are up to 3 mm and 100 µm, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He (23S)+ → N2+ Penning ionization reaction zone.
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