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Schottky diode technology at Rutherford Appleton Laboratory

机译:卢瑟福·阿普尔顿实验室的肖特基二极管技术

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Most parts of the electromagnetic spectrum are well understood and exploited, but the terahertz region between the microwave and infrared is still relatively under developed. Potential receiver applications are wide-ranging and cross-disciplinary, spanning the physical, biological, and medical sciences. In this spectral region, Schottky diode technology is uniquely important. InP MMIC amplifiers are generally limited to frequencies less than ∼200 GHz, above which their noise performance rapidly deteriorates. Superconducting circuits, which require cooling, may not always be practical. Either as varistor diodes (heterodyne mixing), or varactor diodes (sub-millimetre power generation), Schottky technology underpins terahertz receiver development. Two important developments have occurred in recent years. First, the underpinning technology base has demonstrably matured. Planar Schottky diode technology has been shown to be practical at frequencies as high as 2,500 GHz, and frequency multipliers have been shown to be capable of generating 100s of mW at frequencies around W-band. Secondly, circuit designs can now be optimised theoretically with CAD electromagnetic structure simulators and non-linear analysis programs. New high-speed computer controlled mills, improved lithographic capabilities and micro-machining techniques also offer exciting new options for cavity and circuit manufacture. This paper describes the Schottky diode technology currently being developed at the Rutherford Appleton Laboratory. Discrete diode components are described as well as integrated diode/filter circuits. Frequency multiplier diode structures are reported which include novel substrate transfer techniques to reduce the effects of dielectric loading and self-heating.
机译:电磁谱的大多数部分都很好地理解和利用,但微波和红外线之间的太赫兹区域仍然相对开发。潜在的接收申请广泛,跨学科,跨越物理,生物和医学科学。在该光谱区域中,肖特基二极管技术是唯一重要的。 INP MMIC放大器通常限于频率小于〜200 GHz,以上其噪声性能迅速恶化。需要冷却的超导电路可能并不总是实用的。作为压敏电阻二极管(外差混合),或变容二极管(亚毫米发电),肖特基技术支持太赫兹接收器开发。近年来发生了两个重要的发展。首先,支撑技术基础已经明显成熟。平面肖特基二极管技术已被证明在高达2,500GHz的频率下实用,并且已经显示频率倍增器能够在W波段周围的频率下产生100多个MW。其次,现在可以用CAD电磁结构模拟器和非线性分析程序理论上优化电路设计。新型高速计算机控制厂,改进的光刻能力和微加工技术还为腔体和电路制造提供了令人兴奋的新选择。本文介绍了目前在卢瑟福·施珀隆实验室开发的肖特基二极管技术。描述离散二极管组件以及集成二极管/滤波器电路。报告频率乘数二极管结构,包括新颖的基板传递技术,以减少介电负载和自加热的影响。

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