A study on the arch type ultrasonic motor

摘要

This paper is mainly discussing the movement speed of the arch type ultrasonic motor under conditions of different loading, driving voltage, driving frequency and driving methods. As for the arch type ultrasonic motor of the main components, including: an arch base and two ultrasonic actuators. Both sides of the arch base which has three holes at different heights. Those holes can be used to fixed ultrasonic actuators. Therefore, the arch type ultrasonic motor has 18 different driving methods in the x-y plane. According to the experimental results, the maximum movement speed in the x direction is 93.2mm/sec under conditions of 71.0kHz driving frequency, 100Vp-p driving voltage, 54.8Watts input power, net weight and the ultrasonic actuator at the same time in the lowest position. And the maximum movement speed in the y direction is 240mm/sec under conditions of 34.0kHz driving frequency, 100Vp-p driving voltage, 120gw net weight and the ultrasonic actuator at the same time in the lowest position. As the maximum loading is 3.0kgw under conditions of 108.0kHz driving frequency, 100Vp-p driving voltage, 12.9mm/sec movement speed in the y direction and the ultrasonic actuator at the same time in the lowest position.