Comprehensive Study on Reflectance of Si3N4 Subwavelength Structures for Silicon Solar Cell Applications Using 3D Finite Element Analysis

摘要

In this work, a full 3D finite element analysis for the silicon nitride (Si3N4) subwavelength structure (SWS) deposited on the antireflection coating (ARC) of a-Si thin film solar cell is conducted. We investigate the reflectance property of cylinder-, right circular cone-, and square pyramid shape of Si3N4 SWS with various heights and incident angles. The results show that the pyramid shape of SWS possesses the best reflectance property in the optical region from 400 nm to 1000 nm. Comparison with the RCWA work is also reported.