Comparaison between PDMS and PMMA for MEMS Applications

摘要

The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications. The behaviour of the membrane is described by a Neo-Hookean model. This hyperelastic model is widely used for a such material, it can provide a better understanding of deformation mechaanisms.