In the present work, we show a rapid single-step technique to fabricate membrane-based microfluidic channels by femtosecond laser micromachining. Using the proposed technique, both the nanoporous membrane and microfluidic channel can be fabricated in a single step under ambient conditions. The femtosecond laser pulses ablate the Si substrate and first fabricate the microchannel and subsequently using different machining parameters, the nanoporous membrane will be synthesized. The ablation of the substrate causes an accumulation of mass quantity of nanoparticles which forms a porous fibrous nanostructure in the microchannel. Since the membrane is synthesized and grown in the microchannel, strong bond between it and the silicon substrate is attained. This technique has a great potential in various membrane/filtration/separation applications.
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