首页> 外文会议>2011 IEEE International Solid-State Circuits Conference Digest of Technical Papers >A 6.7nV/√Hz Sub-mHz-1/f-corner 14b analog-to-digital interface for rail-to-rail precision voltage sensing
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A 6.7nV/√Hz Sub-mHz-1/f-corner 14b analog-to-digital interface for rail-to-rail precision voltage sensing

机译:6.7nV /√HzSub-mHz-1 / f-corner 14b模数接口,用于轨至轨精密电压感测

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摘要

Many sensors demand energy-efficient precision voltage sensing interfaces with low noise performance down to very low frequencies. Examples include micro Kelvin resolution temperature sensors for wafer stepper temperature stabilization [1] and others [2]. In many such applications, analog-to-digital conversion is inevitable, which mandates sampling. So far, sensor interfaces have demonstrated low offset drift using chopping/auto-zeroing while preserving the intrinsic SNR of the transducer by anti-aliasing filtering before sampling. Integration with a boxcar window, or boxcar sampling, is a particularly convenient way to realize anti-aliasing filtering in the sampling process [3]. However, implementations of the technique, due to their use of just a voltage-to-current converter whose output current is integrated over a time window, e.g. in a sigma-delta modulator [2], remain susceptible to gain drift resulting from either transcon-ductance or time window drift. Meanwhile, related work suggests that embedding the boxcar sampler in a feedback loop effectively removes this limitation [4]. Whereas the loop in [4] is closed electromechanically, the design presented here overcomes the same limitations by using a purely electrical feedback loop to establish a well-defined gain that is insensitive to boxcar sampler parameter drift.
机译:许多传感器要求具有低噪声性能(低至非常低的频率)的高能效精密电压感测接口。示例包括用于晶圆步进温度稳定的微型开尔文分辨率温度传感器[1]和其他[2]。在许多此类应用中,模数转换是不可避免的,这要求采样。到目前为止,传感器接口已经证明了使用斩波/自动调零的低偏移漂移,同时通过采样前的抗混叠滤波来保留传感器的固有SNR。与Boxcar窗口集成或Boxcar采样是在采样过程中实现抗锯齿滤波的一种特别方便的方法[3]。但是,由于仅使用电压-电流转换器,因此该技术的实现方式在输出电压在一个时间窗内积分,例如在一个时间窗口内。在sigma-delta调制器[2]中,仍然容易受到跨导或时间窗口漂移引起的增益漂移的影响。同时,相关工作表明,将Boxcar采样器嵌入反馈回路可有效消除这一限制[4]。尽管[4]中的回路是机电闭合的,但此处提出的设计通过使用纯电反馈回路来建立对箱车采样器参数漂移不敏感的明确定义的增益,克服了相同的限制。

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