Mode conversion of via discontinuities in multilayer interconnect structures is investigated. Electromagnetic waves travelling along the transmission channels consisting of the horizontal transmission line and vertical via generally excite higher order evanescent modes as well as other propagating modes when encountering discontinuities. Current distributions along the transmission channel are determined by the method of moments and the Galerkin weighting procedure. Matrix pencil method is used to obtain the electromagnetic solutions in frequency domain, the currents along the channels is split into forward and backward multiple mode traveling-wave amplitudes, and dominant modes are extracted for further analysis about radiation mechanism.
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