Measuring optics' surface information with digital image processing technology

摘要

The quality of optics' surface is of an important character which has critical influence in optical system. There are many ways to detect surface quality, but interferometry is considered as an effective technology. Interfere fringes which obtained from our experiment based on equal thickness interference were processed with digital image processing (DIP) technology in this paper. Image smoothing, fringes thinning, fringes' space measurement and P-V value measurement were done in this processing, Which can give optics' surface information automatically and accurately. We measured some optics whose apertures are not more than 30mm, and the result is satisfactory. Our method will be widely used in industrial inspection, especially in optical works in the future.