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Investigations on model-based uncertainties for the reconstruction of 2D periodic surface profiles in scatterometry

机译：基于模型的不确定性在散射法中重建二维周期性表面轮廓的研究

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We report on modeling and uncertainty estimates for the evaluation of measurements in scatterometry, i.e., the determination of periodic surface structures from light diffraction patterns.

机译：我们报告了建模和不确定性估计，用于评估散射测量的测量，即从光衍射图案确定周期性表面结构。

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《EOS topical meeting on diffractive optics》|2011年|p.13-14|共2页
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H. Gross; M. A. Henn; A. Rathsfeld; F. Scholze; B. Bodermann; et al:;
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中图分类应用光学;
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专利

1. Investigations on a robust profile model for the reconstruction of 2D periodic absorber lines in scatterometry [J] . H. Gross, J. Richter, A. Rathsfeld, JEOS:RP . 2010,第1期

机译：用于散射法中二维周期吸收线重建的鲁棒轮廓模型研究
2. Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates [J] . H Gross, A Rathsfeld, F Scholze, Measurement Science & Technology . 2009,第10期

机译：极紫外（EUV）散射测量中的轮廓重建：建模和不确定性估计
3. On the Interaction between Silica Surfaces and Surfactants. A 2D Periodic B3LYP Investigation [J] . Geyser Fernandes-Cata, Aurora Pfrez-Gramatges, Luis Javier Alvarez The journal of physical chemistry, C. Nanomaterials and interfaces . 2009,第30期

机译：关于二氧化硅表面和表面活性剂之间的相互作用。二维定期B3LYP调查
4. Investigations on model-based uncertainties for the reconstruction of 2D periodic surface profiles in scatterometry [C] . H. Gross, M. A. Henn, A. Rathsfeld, EOS topical meeting on diffractive optics . 2010

机译：对散射测定法重建模型的不确定性的研究
5. Segmentation, Reconstruction and Recognition of Objects and Surfaces in 2D and 3D [D] . Sun, Bo. 2021

机译：2D和3D对物体和表面的分割，重建和识别
6. Periodic Density Functional Theory Investigation of the Uranyl Ion Sorption on Three Mineral Surfaces: A Comparative Study [O] . Jérôme Roques, Edouard Veilly, Eric Simoni 2009

机译：铀在三个矿物表面上吸附的周期性密度泛函理论研究：比较研究
7. Investigations on a robust profile model for the reconstruction of 2D periodic absorber lines in scatterometry [O] . H. Gross, J. Richter, A. Rathsfeld, 2010

机译：对散射测定法重建的强大型材模型的研究

Investigations on model-based uncertainties for the reconstruction of 2D periodic surface profiles in scatterometry

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