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Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces
Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces
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机译:利用从正面和背面的椭偏测量获得的光谱数据确定薄膜中的厚度和杂质分布
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摘要
Disclosed is spectroscopic ellipsometer system mediated methodology for quantifying thickness and impurity profile defining parameters in mathematical models of impurity profile containing thin membranes having two substantially parallel surfaces which are separated by a thickness, wherein the spectroscopic ellipsometer system operates in near-IR and IR wavelength ranges.
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