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Effects of lithographic roughness and sidewall slope on the optical performance of polymer rectangular waveguides: Modeling

机译:光刻粗糙度和侧壁坡度对聚合物矩形波导光学性能的影响:建模

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Fabrication of polymer, multimode, channel waveguides have gained much attention recently because of usefulness in replacing fiber in backplane interconnects. Waveguides are more desirable because they are able to achieve greater bandwidth, they are immune to electromagnetic interference and they consume less power compared to traditional electrical communication links. They are however subject to insertion losses due to fabrication defects such as the waveguide sidewall roughness and sidewall slope. This requires fabrication tolerances that are on the micron level. Determining the acceptable minimum tolerances required in the fabrication process in terms of the overall channel link budget is critical for determining how precise of fabrication methods must be utilized.
机译:聚合物,多模,通道波导的制造近来备受关注,因为它在替换背板互连中的光纤方面很有用。与传统的电通信链路相比,波导是更理想的,因为它们能够实现更大的带宽,抗电磁干扰并且消耗的功率更少。然而,由于诸如波导侧壁粗糙度和侧壁斜率之类的制造缺陷,它们遭受插入损耗。这需要微米级的制造公差。就整个通道链路预算而言,确定制造过程中所需的可接受最小公差对于确定必须如何利用制造方法的精确度至关重要。

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