IP library-based general and visualized MEMS device simulation and verification tool

摘要

In this paper, we present an IP (Intellectual Property) library-based general and visualized MEMS device simulation and verification tool in order to solve the problem that: 1. inaccurate in mechanical properties' simulation of MEMS design system; 2. disjoint of designing and processing in MEMS device manufacture. The IP library-based general and visualized MEMS device simulation and verification tool is composed of six parts, which are IP library, Virtual processing, Virtual assembly, Virtual operation, Process verification and Layout verification. The essential idea of the system is to design the device virtually and store the successful designing result in the form of IP library, including its processing design, layout and the dynamic model of the device. Therefore, we solve the problem 1 which is put up above by Virtual processing and the two verification system, meanwhile we use the Virtual assembly and the Virtual operation to do a better simulation in mechanical properties.