Study of proportion and fuzzy control method upon precision micro-flow valve

摘要

Micro-titration technique, based on the condition of precision and ultra-precision, is an important part in Modern Micro-flow control technology and is also one of key technologies in Nano technology in 21^st Frontier Technology. In this paper we built a precise flow valve model driven by piezoceramics and then drive the flow valve spool using the inverse piezoelectric effect of piezoelectric ceramics to control the size of precise flow valve and model building based on mathematical relationship among the driving power, the output displacement and the output flow. In view of the non-linearity, hysteresis, creep and other properties of piezoelectric ceramics affecting the control accuracy and control of complex, it proposed a proportional fuzzy control method and obtained more desirable results comparison in the commonly used control methods.