A Study of the Corner Cube Reflector Sturcture Used in Laser-IFF System

摘要

A Micro-opto-electromechanical systems (MOEMS) corner cube reflector (CCR) is widely used in Laser-IFF (Laser-Identify Friend or Foe) system as an optical switch. The responder modulates the reflected laser light beam by twisting an acting bottom micro mirror of the CCR which is electrostatically-driven. In this paper, four designed structures of the active bottom micro mirror, applied with same load, have different offsets using ANSYS (analysis system). By analyzing the experimental results, we can see the relationships between the structure parameters and the torsion of the active bottom micromirror.