Fabrication of micro gear based on micro-milling

摘要

With the rapid development of micro-parts and MEMS, It is necessary to study the micro gear using different manufacturing technology. In this paper, it is described the fabrication of micro gear via micro model milling in the micro turn-milling NC machine. A micro gear with the module is 100µm and the thickness is 400µm is machined using the micro involute gear milling Cutter which is designed particularly. The experiment of micro-milling is executed by the two different method of milling, which is the conventional milling and climb milling, the vibration is detected and analyzed in order to chose the best milling method. The micro gear which teeth is 18 and 20 is processed in climb milling and assembled successfully eventually.