An optical scan-calibration system in Scanning Near-field Optical Microscopy

摘要

Scanning Probe Microscopes(SPM) use piezoelectric actuators to generate the scans. But the nonlinearities inherent in the piezoelectric actuators limit the usefulness of the instruments in precision metrology. This paper describes a simple optical beam displacement sensor that is used to accurately measure the (x,y) position of a piezoelectric tube scanner used in Scanning Near-field Optical Microscope(SNOM). As the nonlinearities is too complex to make up a simple math model, this paper use the Artificial neural network to Calibrate the nonlinearities.