Study on a piezoelectric structure based active vibration isolation system for high precision equipment

摘要

Vibration is one of the limiting factors to achieve ultra precision in ultra precision metrology or manufacturing equipments. In this paper, an active vibration isolation system using piezoelectric actuators for ultra precision equipment is presented. The effectiveness of the vibration suppression by piezoelectric actuators under different configurations is investigated numerically. The model reference adaptive control is taken for the control of piezoelectric actuator. The result of theoretical analysis and simulation demonstrate the performance and effectiveness of the system.