Analysis and Simulation of RF MEMS Switch

摘要

Along with the fast development of the automotive electronics technology,the wireless communication technique on vehicles has huge market potential.This paper takes the cantilever beam MEMS switch as an example to discuss mechanical principle and function simulation of the RF MEMS switch used in Vehicle-carried radio frequency communication.We select three kinds of cantilever beams with different section to analyze their switch characteristics,compute and use ANSYS software to carry out multi-physical coupling analysis and simulation.The threshold voltage,inherent frequency and optimal design of three kinds of beams are also discussed.The results provide a satisfactory theoretical support to design various high performance RF MEMS switches with variational section beam.