State of the Art of mass production: challenges for low-cost and application benefits of high performances small-pitch IR detectors

摘要

HgCdTe (Mercury Cadmium Telluride / MCT) staring arrays for infrared detection do show constant improvements regarding their compactness and performances. New detectors are now proposed offering system solutions in the different IR wavebands and taking advantage of the latest technology improvements as well as MCT performance advantages and cost reduction.Based on 20 years of experience in 50μm to 15μm pitch Infrared (IR) detector production, the challenge of mass production of low-cost small-pixel pitch detectors are reviewed, from the IR chip manufacturing including detection material, hybridization, ROIC, to the integration in final packing. Taking advantage of its simple well known existing process, then the analyzes of all technological steps adapted to small pitch IR detector are presented, in terms of product performance, reliability, process statistics and capability in order to achieve high yield and low product cost. Answers given the low-cost small-pitch IR detector mass productions finally give benefits to application in terms of high performance, cost reduction, extended life time, and on the field system Life Cycle SupportAmong these new detectors, one can find the family of 15 μm pixel pitch detectors a TV format (640 × 512) integrated in dedicated tactical Dewars, taking advantages on last development in coolers manufacturing and Dewar assembly.