Etching of Chalcogenide Glass for IR Microoptics

摘要

Manufacturing processes have been developed to produce wafer scale optics in chalcogenide glass using semiconductor fabrication. Chalcogenide materials are amorphous and covalently bonded solids containing one or more of elements in Group VI in the periodic table, e.g. sulphur, selenium, or tellurium as a substantial constituent. For this paper, the material selected for testing to determine the etching process was IG6 - As_(40)Se_(60). Grayscale photolithography and binary methods were used to pattern diffractive elements for use in infrared applications. Dual-band color correction, incorporating diffractive optics, will be presented in the paper as an application of this development.