Micromirror array for multiobject spectroscopy in ground-based and space telescopes

摘要

We are developing single-crystalline silicon micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (IR MOS). The micromirrors are 100μm × 200μm in size and can be tilted by electrostatic actuation yielding a tilt-angle of 20°. Arrays of 5×5 micromirrors were gold-coated and tested at below 100K. The coated and uncoated micromirrors are optically flat (peak-to-valley deformation < λ/20 for λ > 1μm) at room temperature and in cryogenic environment. Successful actuation has been done at room temperature and at temperatures below 100K. Large arrays of 200×100 micromirrors are being fabricated and an actuation scheme for extremely large arrays has been developed.