Thermal and Optical Characterization of CollectorsIntegrated in a Sn-DPP based SoCoMo

摘要

The paper presents the results of an investigation into the thermal and optical characteristics of alpha-type dual-mirrorgrazing incidence collectors for Extreme Ultra-violet Lithography integrated into a tin-fueled discharge produced plasmasource. The performance of the system is assessed at various power levels and temperature conditions. The thermal andthe optical data, in particular images at extra-focal planes behind the intermediate focus, are compared to the predictionsof the thermo-optical model of the system. The data we present provide verification of the models used to design thecollector and validation of the thermo-optical modeling approach for design of future generations of collectors.