Fabrication of SnO_2 Nano Patterns Using Surface Relief Grating

摘要

Nano- and micro-structured SnO_2 has been widely utilized as gas sensors. These SnO_2 based gas sensors are often made by chemical etching, vapor deposition or lithography. Here we report a facile and vacuum-free technique to fabricate large area one-dimensional periodic SnO nano arrays using surface relief grating created on azobenzene functionalized polymer thin films as templates. Atomic force microscopy, scanning electron microscopy and energy dispersive X-ray spectroscopy characterizations confirmed the successful fabrication of SnO_2 nano arrays. The fabricated SnO_2 structures exhibited the same periodicity as the templates with a width of a few hundred nanometers.