REAL-TIME GLUCOSE SENSING USING A MEMS-BASED BI-MATERIAL DEFLECTING MEMBRANE

摘要

A HEMA polymer, which swells in the presence of glucose, can be used in a laminated membrane and incorporated into a MEMS device to measure, in real-time, the concentration of glucose in solution. Design of such a device requires careful experiments to determine the swelling behavior of the HEMA, as well as the composite response of a laminated system. We have shown that the swelling can be controlled by changing the cross-link density. Incorporation of the polymer into a device requires a novel fabrication approach utilizing XeF_2 vapor phase etching. Current experiments are aimed at establishing a theoretical model to predict the mechanical properties of a HEMA/PDMS bi-layer system.