Four-Axes Laser Measurement System for Precision Machine Tool

摘要

The aim of this paper is to establish a laser online measurement and location system for ultra-precision machine tool to ensure the machining accuracy and positioning accuracy. Based on laser heterodyne inter-ferometry the existing installations have been improved by combining several existing principle of measurement. An optical compensation board is designed in order to get a clearer picture and to reduce the error due to the introduction of campaigns. In this design process,frequency division is carried through by taking full advantage of the laser high energy character to get acceptable double frequency and difference frequency signal. Meanwhile, signals are accepted in the signal processing devices as far as possible because of taking into account the high power characteristics of laser. In addition, for the far distance measurement and high precision measurement of ultra-precision measurement,environmental factors are the major sources of precision measurement error. At last, discussion of a more detailed analytic description and the corresponding solutions are also given. The fast Fourier transformation process program is designed, which is calculated on the basis of available in the Fourier transform, to satisfy the design plan of the paper.