The Mechanical Study on a Closed and V Style MEMS Planar Microspring

摘要

The V style MEMS microspring is a wholly closed microspring. To analyze its stiffness, the mathematics formula about the relationship between the stiffness and parameters of microspring should be presented. The mechanics model of the V style planar microspring was established in the paper. The calculation formula of spring constant about V style microspring in the linear range was derived by the Castigliano's second theorem of energy method and the deformation in the linear was simulated by Finite Element Analysis (FEA) ANSYS software. The simulation results are tally with the formula results in the linear range but not in the nonlinear range. Adopting deep Ultraviolet lithography of SU-8 photoresist to replace the expensive synchrotron radiation lithography of LIGA technology, the nickel standard sample and V style nickel microspring which included four atomic-elements were produced. Then the stress-strain curve and the force-displacement curve were gained. In the linear range,the experiment data are tally with the formula results,which shows the correctness of the formula and the theory analysis.