Fabrication and characterization of Epoxy/BaTiO_3 composite capacitor films for high frequency behaviors

摘要

Epoxy/BaTiO_3 composite embedded capacitor films (ECFs) were newly designed for high dielectric constant and low tolerance (less than ±5%) embedded capacitor fabrication for organic substrates. In terms of material formulation, ECFs are composed of specially formulated epoxy resin and latent curing agent, and in terms of coating process, a comma roll coating method is used for uniform film thickness in large area. Dielectric properties of BaTiO_3 (BT) & SrTiO_3 (ST) composite ECF is measured MIM capacitors on 10×10 cm PCBs. For 12 um thickness and 50 vol.% BTO ECFs, dielectric constant of 39, dielectric loss of 0.017, capacitance density of 2.4 nF/cm2, and less than 10% tolerance were obtained. Dielectric constant of BT ECF is bigger than that of ST ECF, and it is due to difference of permittivity of BT and ST particles. Dielectric constant of BT & ST ECF in high frequency range (0.5～10GHz) is measured using a cavity resonance method. In order to estimate dielectric constants at high frequency, the reflection coefficient is measured with a network analyzer. Dielectric constant is calculated by observing the frequencies of the resonant cavity modes. Although there was no dielectric relaxation observed at pure epoxy, for BT ECF, there is the dielectric relaxation at 5～9GHz. It is mainly due to changing of polarization mode of BT powder itself. In contrast, there is no relaxation for ST ECF up to 10GHz.