First pin/pin micromorph modules by laser patterning

摘要

The well-established laser-scribing currently used for a-Si:Hmodule fabrication, has been applied to “micromorph”(a-Si:H/μc-Si:H) tandem solar cells deposited on glass/ZnOsubstrates. Thereby, a laser at a wavelength of 1064 nm was used forscribing the ZnO and a laser with a wavelength of 532 nm for the siliconfilm scribing. It is shown that with glass-side scribing, both the 0.3μm thick a-Si:H top cell as well the 3 μm μc-Si:H bottom cellcan be patterned in one single pulse. Monolithic integrated seriesconnection is obtained with a total of 3 patterning steps. These firstexperiments allowed for fabrication of micromorph mini-modules (area23.3 cm²) having 6 segments has been fabricated with a stableaperture efficiency of 9.1% (V_∝=8.014 V, FF=66.6%,I_sc=39.72 mA)