Micromachined split-block Schottky-diode mixer for 600 GHz

摘要

This paper presents simulation results for a 600 GHz micromachined waveguide mixer with integrated horn antenna, a hybrid-integrated planar Schottky diode and IF filter structures on a quartz substrate. In addition to the simulated electrical performance we show approaches for the manufacturing of the split-block mixer by both micro-mechanical milling and silicon etching technology.