FRICTION CONTROL IN POSITIONING BY AE DETECTION

摘要

Sensing of friction for fine positioning control by using a sensor fusion via the neural network to process data from AE (acoustic emission) sensors and a disturbance control is described in this paper. The proposed feed forward compensation is a useful method of positioning control when disturbances applied to the system are to be estimated. Experimental results show the effectiveness of both techniques in friction sensing and fine positioning control. Both methods will also be applicable, without modification, to nm-scale positioning.