Monolithic Ⅲ-Ⅴ and Hybrid Polysilicon-Ⅲ-Ⅴ Microelectromechanical Tunable Multilayer Filters and Vertical Cavity Surface Emitting Lasers

摘要

We report our progress on the design and fabrication of electrostatically-actuated microelectromechanical (MEM) tunable wavelength filters and vertical cavity surface-emitting lasers (VCSELs). We investigate both an all-semiconductor monolithic approach and a hybrid approach based on the combination of conventional polysilicon microelectromechanical systems (MEMS) and Ⅲ-Ⅴ semiconductor thin-film distributed Bragg reflector (DBR) and VCSEL structures. In the tunable hybrid structures the Ⅲ-Ⅴ semiconductor layers are flip-bonded onto specially designed polysilicon foundry MEMS structures and separated from their lattice-matched parent substrates by a novel post-bonding lift-off process.