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Evaluation of coherent fibre-bundle characteristics for use in an ESPI-based instrument for measuring strain in electronic packages

机译:评估用于基于ESPI的仪器中的相干纤维束特性,以测量电子封装中的应变

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Modem connection and packaging methods used in integrated circuit manufacture, in particular ball-grid array (BGA) and flip-chip techniques, involve the compression at elevated temperatures of solder balls and gold bumps between the die of silicon or GaAs and a substrate typically of alumina, glass-epoxy composite or AIN. The die and substrate generally have widely differing coefficients of thermal expansion, which results in residual stress in the assembly on cooling, and subjects the solder balls or gold bumps to shearing forces. A prototype instrument based on electronic speckle pattern interferometry (ESPI), currently under development at EMPA as part of the HIRONDELLE project, is intended to measure the strain fields developed in BGAs and other devices under thermal load. One mode of operation of the instrument involves the use of coherent fibre bundles to transfer the images of the BGA to the object plane of the camera. We report here on the tests we have performed on different types of bundles to measure optical parameters relevant to our micro-imaging application: cross-talk between adjacent fibres, optical transmission quality; modulation transfer function and limiting resolution; and fringe density and modulation in an ESPI set-up. On the basis of the results we were able to select the bundle most suitable for the HIRONDELLE instrument.
机译:集成电路制造中使用的现代连接和封装方法,尤其是球栅阵列(BGA)和倒装芯片技术,涉及到在高温下对焊球和硅或GaAs裸片与衬底之间的金凸点(通常是硅片或硅片)进行压缩。氧化铝,玻璃环氧树脂复合材料或AIN。管芯和基板的热膨胀系数通常相差很大,这会导致组件在冷却时产生残余应力,并使焊球或金凸块受到剪切力。基于电子散斑图案干涉术(ESPI)的原型仪器目前正在EMPA上作为HIRONDELLE项目的一部分进行开发,旨在测量在热载荷下BGA和其他设备中产生的应变场。仪器的一种操作模式涉及使用相干的光纤束将BGA的图像传输到相机的物平面。我们在这里报告我们在不同类型的束上进行的测试,以测量与微成像应用相关的光学参数:相邻光纤之间的串扰,光学传输质量;调制传递函数和极限分辨率;以及ESPI设置中的边缘密度和调制。根据结果​​,我们能够选择最适合HIRONDELLE仪器的套件。

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