Modelling the Influences of Axial Cylindrical Form Errors on the Measurement Result of the Gracing Incidence Interferometry Based on the Optical System of the Tropel Cylindermaster CM25

摘要

The use of optical measuring instruments is increasing. To enlarge the knowledge about effects and the influences of boundary conditions, as for example the temperature or humidity, the processes used have to be understood very well. This is of particular importance in the field of manufacturing metrology as nowadays the instruments are widely used under rougher conditions than ever before. One way to get an improved idea of how the results are influenced is the numerical simulation of the measurement. This is the major point presented in this paper. As the project being part of a work to compare tactile and optical measurements one chapter deals with this theme too.