Magnetically Excited Flexural Plate Wave Devices for Sensor Applications

摘要

Sandia National Laboratories has developed magnetically excited flexural plate wave (FPW) devices for use in sensor applications. An FPW consists of a serpentine transducer line over a thin, prestressed membrane that is located in a magnetic field. An alternating current through the transducer lines excites resonant modes in the membrane. By tracking the resonant frequency, FPW devices can be used as temperature, strain and pressure sensors, and as microbalances in chemical detectors. This paper discusses the design and fabrication of FPW based sensors, and presents test results from these devices.