Magnetic Properties of SmCo Nano Films Grown by a Nd-YAG Pulsed Laser Ablation Method

摘要

Nanoscaled SmCo films were deposited on Si(100) substrate by a Nd-yAG pulsed laser ablation technique. The films were grown by either using the single target of Sm_100-xCo_x (75<=x<=93) at the substrate temperature of 600 approx 700 deg C, or thermal diffusion treatment of Co/Sm/Co multilayers deposited at the same temperatures. The magnetic films usually consisted of SmCO_5, and Sm_2Co_17 phases after the both processes. 4piM_s of the films consisting of SmCO_5+Sm_2Co_17 generally ranged over 5.0 approx 7.5 kG in common. However, coercivity values of the films were dependent upon the process employed. For the case of single target, a very high _iH_c(2 approx 6 kOe) was obtained from the films grown using the laser beam density of 1x10~5 J/cm~2, while a low coercivity(approx approx 200 Oe) was measured from the films grown using a low laser beam density(161 J/cm~2). This difference was discussed in terms of the formaiton of SmCO_5 droplets formed on the film surface