A new technique for the hydrogenation of silicon tetrachloride

摘要

During the manufacture of semiconductor polycrystalline silicon, large quantities of Silicon Tetrachloride are produced as by-product, which increase the consumption of the raw materials and energy, and cause environmental pollution. In this paper, a new technique for hydrogenation of Silicon Tetrachloride has been developed. In the temperature range from 400 to 500 deg C, the pressure range from 1.3 to 1.5 MPa and the presence of catalyst, hydrogen and metallurgical grade silicon powder, Silicon Tetrachloride is converted into Trichlorosilane. After condensation process and separation process, Trichlorosilane can be reduced to polysilicon directly by hydrogen. The quality of reduced production is better than that of synthetic method. The direct conversion rate of Silicon Tetrachloride is above 25